Cryogenic Silicon Analysis System (CryoSAS)
CryoSAS combines Bruker’s high performance FT-IR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.
High sensitivity:
CryoSAS analyzes shallow impurities (e.g. Boron, Phosphorous etc.) down to the low ppta level according to the ASTM/SEMI MF1630 standard. Furthermore it simultaneously analyzes Carbon and Oxygen down to the low ppba level according to the ASTM/SEMI MF1391 standard.